The 69th JSAP Spring Meeting 2022
Session ID : 22a-E202-2
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
Fabrication of semi-polar {20-21} GaN substrate by hydride vapor phase epitaxy and investigation of stress and polarization characteristics
*Shunsuke Tanigawa, Ryusei Misaku, Narihito Okada, Jie Song, Jung Han, Satoshi Kurai, Yoichi Yamada, Kazuyuki Tadatomo
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