JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 69th JSAP Spring Meeting 2022
Session ID : 22p-E202-8
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Characterization of AlN/AlxGa1-xN HEMTs with highly degenerate n+-GaN ohmic contact prepared via sputtering
*Ryota MaedaYuto NishikawaKohei UenoAtsushi KobayashiHiroshi Fujioka
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© 2022 The Japan Society of Applied Physics
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