The 69th JSAP Spring Meeting 2022
Session ID : 25a-E301-2
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
Quantitation of the concentration of silicon vacancies in 4H-SiC formed by electron beam irradiation
*Shu Motoki, Shin-ichiro Sato, Seiichi Saiki, Yuta Masuyama, Yuichi Yamazaki, Yasuto Hijikata, Takeshi Ohshima
Author information
Keywords:
25a-E301-2,
Silicon Vacancy,
Electron Spin Resonance,
Optically Detected Magnetic Resonance
Details
Article 1st page
