The 69th JSAP Spring Meeting 2022
Session ID : 26a-E104-6
Conference information
Host:
The Japan Society of Applied Physics
Name :
JSAP Spring Meeting
Number :
69
Location :
[in Japanese]
Date :
March 22, 2022 - March 26, 2022
Impact of Interstitial Oxygen on Stability of Nitrogen-Vacancy Complexes in Czochralski Silicon Single Crystals