The 69th JSAP Spring Meeting 2022
Session ID : 22a-P01-8
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
Micarofabrication of single-cell isolation plates and microfluidic devices by KOH etching using Si amorphized mask by Ar+beam irradiation
Details
Article 1st page
