The 69th JSAP Spring Meeting 2022
Session ID : 22a-E203-2
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
High temperature stability of MoS2 probed by combining thermal desorption spectroscopy and atomic layer deposition
Keywords:
22a-E203-2,
Molybdenum disulfide,
Thermal Desorption Spectroscopy,
Atomic Layer Deposition
Details
Article 1st page
