The 69th JSAP Spring Meeting 2022
Session ID : 24a-E102-6
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
ZrxHf1-xS2 Alloy Film Formation by RF Magnetron Sputtering Co-deposition
*Shusei Hanafusa, Yusuke Hibino, Ryo Yokogawa, Hitoshi Wakabayashi, Atsushi Ogura
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