JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 69th JSAP Spring Meeting 2022
Session ID : 25p-E202-13
Conference information

Host: The Japan Society of Applied Physics

Name : JSAP Spring Meeting

Number : 69

Location : [in Japanese]

Date : March 22, 2022 - March 26, 2022

Growth and electrical properties of α-In2O3 by Mist CVD using In2O3 powder or In(acac)3 as source precursor
*Akito Taguchi, Kentaro Kaneko, Shizuo Fujita, Takeyoshi Onuma, Tohru Honda, Tomohiro Yamaguchi
Author information
Keywords: 25p-E202-13, Mist CVD, indium oxide, source precursor
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (356K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© 2022 The Japan Society of Applied Physics
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top