The 69th JSAP Spring Meeting 2022
Session ID : 23p-D113-9
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 69
Location : [in Japanese]
Date : March 22, 2022 - March 26, 2022
Detection of biomaterial interaction by reflectometry using c-axis tilted ScAlN thin film
Details
Article 1st page
