2022 Volume 2022 Article ID: 220305
Cryogenic-CMOS (cryo-CMOS) technology has attracted considerable attention for realizing large-scale quantum computers. To develop cryo-CMOS circuits, a compact model that reproduces cryogenic MOSFET operations is required. Therefore, understanding the metal–oxide–semiconductor field-effect transistor (MOSFET) performance at cryogenic temperatures is critically important. However, the cryogenic operation of MOSFET is quite different from that at room temperature, and device physics is not fully understood. This study provides an overview of cryo-CMOS technology with a particular focus on device performance and presents future outlooks.