2022 Volume 2022 Article ID: 220406
Semiconductor devices, which have become indispensable in our daily lives, operate based on the movement of charge carriers (electrons and holes) in real and energy spaces. We developed a photoelectron emission microscope (PEEM) with femtosecond laser pulses to evaluate semiconductor materials and devices. In addition to spatial resolution using a PEEM and temporal resolution using laser pulses, the energy resolution is accompanied by continuously varying the photon energy of the laser pulses in the ultraviolet region. As a result, the dynamics of conducting electrons are imaged with a high signal-to-noise ratio. In this paper, we describe the details of the system and present two results on advanced materials.