抄録
Two types of multi-ferroic actuator/sensor devices. i.e. (1) magnetically driven composite actuator and (2)
multi-functional surface acoustic wave (SAW) sensor by MEMS are presented for intelligent/smart
technologies. The large-scale robust composite actuator (1) is designed to combining the ferromagnetic
property with superelasticity of shape memory alloy (SMA) because it can be driven with high speed as
well as considerably large strain by applying a wireless magnetic field. The composite is reinforced by the
superelastic fiber or lamellar of shape memory alloys (TiNi, CuAlMn) in the ferromagnetic metal(Ni, Fe)
matrix. Secondarily, multi-functionally designed, multi-ferroic senor device of surface acoustic wave
(SAW) is introduced. Piezoelectric LiNbO3(x-y cut) base materials are used. IDT has been produced by
lithography. On the surface part between IDTs, environmentally active material films such as SMA, FSMA,
magnetostrictive alloy etc. are formed by magnetron-sputtering. These results show the possibility of a
new type of multi-functional composite actuator and sensor based on multi-ferroic effect.
