Abstract
A CoSb3 compound with a skutterudite structure (MX3) is one of promising thermoelectric materials. In this study, the preparation of CoSb3 thin films on glass substrates by the RF-magnetoron sputtering method has been researched. By using a Co-target and a Sb-target, simultaneous and alternate sputtering methods were carried out. Single phase CoSb3 thin films have been successfully obtained under the following conditions; (1) annealing at 200°C in a vacuum after simultaneous sputtering, (2) annealing at 400°C in a vacuum after making multilayered Co/Sb/Co/Sb films by alternate sputtering.
