Fe-Co積層膜の熱酸化による微視的構造と磁気特性

抄録

It has been found that the oxidation process in heat treatment of Fe-Co double-layer films is different depend upon whether the films are Fe/Co or Co/Fe type. The relations between the magnetic properties and the microscopic structures oxide of films have been studied by X-ray diffraction, Auger erectron spectroscopy (AES) and Vibrating sample magnetometer (VSM).
Both types of films have perpendicular magnetic anisotropy. When the upper Fe layer of Fe/Co film was oxidized by heat treatment, oxide grains growing perpen-dicularly to the substrate are considerd to cause the anisotropy. In the case of the Co/Fe film, the Fe layer had a greater affinity for oxygen than Co, so that the layer diffused to the surface and was preferentially oxidized. The anisotropy can be attributed to weakening of magnetic interaction among grains by the oxides formed at the Co grain boundaries.