Abstract
The results of experimental investigation of the integrated superconducting microcircuits for mm wave receivers and digital devices are presented. The high quality Nb-AlOx-Nb tunnel junctions have been successfully used to develop the low noise superconductor-insulator-superconductor mixer and to elaborate the SQUIDs and single flux quantum logic devices. The proposed mixing elements avoid the influence of the junction nonuniformity in the array, provide the optimal matching on both rf input and IF output, tune out junction capacitance. All-refractory material 11-layer 5μm integrated technology has been employed for fabrication of superconducting circuits with parameters spreading less then 10%. A new A/D converter which includes a comparator, reversible binary counter with do outputs have been fabricated and tested. The Josephson counter type A/D converter is very promising for high-accuracy measurement of a medium-bandwidth signal.
