Journal of Advanced Science
Online ISSN : 1881-3917
Print ISSN : 0915-5651
ISSN-L : 0915-5651
回転移相子型偏光解析装置の測定精度に関する研究
Nobuhiro MATSUZAWATakehisa SHIBUYAHideshi YOKOTAShuichi KAWABATA
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1997 年 9 巻 1-2 号 p. 113

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The Rotating Compensator Ellipsometer (RCE) which are measured comparatively fast and higher accuracy can be determined all Stokes-parameters. But alignment of the RCE equipped with many optical components is tedious work. Use of the RCE and its attendant problems are discussed.

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