Journal of the Japan Society for Abrasive Technology
Online ISSN : 1880-7534
Print ISSN : 0914-2703
ISSN-L : 0914-2703
Papers
Pin formation on porous material with sandblasting technique
Atsunobu UNE, Kenichiro YOSHITOMI, Masaaki MOCHIDA
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Keywords: porous pin chuck, chemical mechanical polishing, vacuum pin chuck, polishing, wafer flattening, high flatness, sandblasting technique
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2005 Volume 49 Issue 11 Pages 632-637

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[in Japanese]
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© 2005 by The Japan Society for Abrasive Technology
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