Journal of the Japan Society for Abrasive Technology
Online ISSN : 1880-7534
Print ISSN : 0914-2703
ISSN-L : 0914-2703
Papers
Development of silica PVA wheels for wet mirror grinding of a silicon wafer
Yasuhiro TANI, Tetsuo OKUYAMA, Shiro MURAI, Yasuyuki KAMIMURA
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Keywords: back grinding, silicon wafer, device wafer, silica, MVC, PVA, wet machining, mirror finish
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2005 Volume 49 Issue 11 Pages 638-642

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[in Japanese]
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© 2005 by The Japan Society for Abrasive Technology
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