Abstract
This paper describes the development of an ultraprecision micro-EDM machine, which has a rotating spindle for forming an electrode on the EDM machine. When the room temperature changes by 3°C, the Z-axis of this machine moves in 0.5-nm steps using fine positioning and motioning and thermal displacement control. It was shown that, when the machining method combining EDMing and grinding with use of the same PCD tool on the same machine was applied to processing of micro holes (d=φ50μm), the hole diameter accuracy of the top and bottom surfaces on tungsten carbide (t=100μm) was 0.2μm. The surface roughness of inner hole was also improved.
