Effects of on-machine tool production and micro-tool strengthening with surface modification

Abstract

A system was developed to achieve consistent micro-tool production and work-piece processing. It consists of an ELID grinding system and measurement equipment on a plane in a precision 4-axis processing machine. This system allows production of tools with high accuracy, and deviation of the tool can be reduced to 30 nm. The surfaces of the produced micro-tools were investigated using advanced analytical methods. Fracture strength of the micro-tools was evaluated by nano-indentation testing, and their surface chemical properties were analyzed by XPS. The results suggest that the surface of processed micro-tools had been strengthened by penetration and diffusion of oxygen atoms into the material, and subsequent oxidation.