Abstract
Productivity can be improved if a mirror finished surface can be obtained with grinding instead of polishing. The quality of surfaces finished with conventional grinding wheels composed of fine abrasives is poorer than that of those finished by polishing. Here, we propose a new layer-structured grinding wheel based on a natural whetstone called Awasedo, and describe the development of a grinding wheel with a product layer of silica and mica. The utility of the grinding wheel was demonstrated by grinding of a 3-inch silicon wafer in a constant-pressure process yielding a mirror surface with roughness of 1 nm Ra and 7 nm Rz.
