Abstract
Finishing processes for optical materials, glass, quartz, etc., require high form accuracy, surface quality, and high productivity because of miniaturization and picture quality enhancement of digital cameras and cell phone cameras. Conventional polishing processes are excellent finishing techniques, but require skill and are time-consuming. Therefore improvements in productivity are required. In this study, an EPD polishing method consisting of fixed abrasive polishing is proposed. For the manufacture of an EPD whetstone capable of high-precision polishing of optical parts of various shapes in a short time, the electrode shape and shaping and drying methods were investigated. Here, a method for fabrication of a planar EPD whetstone with high accuracy and repeatability was developed.
