Abstract
Optical microscopes are available at low cost, and are expected to be used for 3D geometric measurement of microstructures. However, the field of view in high-power observation is too narrow, and the depth of field of the optical microscope is extremely shallow. Here, we propose nano-micro 3D geometric measurement using a microscopic video sequence, in which the field of view and the depth of field are expanded by feature point-based image stitching and in-focus estimation, respectively. Furthermore, we estimate axial displacement of microscopic view using intensity variations in a video sequence, and reconstruct a 3D microstructure.
