Abstract
This study was performed to develop high-efficiency micromachining using AFM and machining AFM cantilever. In this paper, we propose two types of machining AFM cantilevers; one is a cantilever with multiple polycrystalline diamond cutting edges called a multi-edged cantilever, and the other is a multiple cantilever with various flexural rigidity called a multi-levered cantilever. Micromachining experiments for Ni-P alloy or single crystalline silicon using AFM are conducted to evaluate these cantilevers as micromachining tools with high efficiency. The results indicated that the multi-edged cantilever was able to simultaneous machine with the same shape, and the multi-levered cantilever was able to simultaneously machine according to each flexural rigidity.
