The validity of the holographic interference technique to detect the internal defects of carbon fiber reinforced plastics (CFRP) was examined. Using the CFRP specimens with artificially formed defects, the detector of the delamination and the internal cavity were tested by using a vibrational excitation method and a vacuum stressing and thermal stressing methods, respectively. As the result, the delamination more than about 30 mm in diameter could be detected by the vibrational excitation method, and the internal cavity more than about 5 mm in diameter by the vacuum stressing and the thermal stressing methods. The vibrational excitation and the thermal stressing methods were valid to detect the presence of the defects but were insufficient to determine the size and shape of defects. The position and dimension of defects could be detected clearly by use of the vacuum stressing method.