In the National Metrology Institute of Japan (NMIJ), a certified reference material (CRM) for specific heat capacity measurements was produced in accordance with the NMIJ’s quality system which is in compliance with ISO GUIDE 34 and ISO/IEC 17025. A material for the CRM was a single-crystalline silicon. Certified values of specific heat capacity were determined based on the heat capacity obtained by a cryogenic adiabatic calorimeter using a pulse-tube refrigerator in the measurement temperature range from 50 K to 350 K. In this paper, the development of the specific heat capacity CRM is reported in detail.