抄録
The nano/micro scale thermal diffusivity in soft materials are important due to the increasing demand for functional thermal properties arising from their wide variety of multiscale high order structures. In the physical point of view, the advanced measurement techniques for the investigation of the thermophysical properties begin to be recognized as the way to understand the internal dynamics and structure of soft materials. The determination of the thermal diffusivity using temperature wave analysis (TWA) method is robust and has been applied to many systems including nano/micro sensing devices. In this study, recent advances in the instrumentation of TWA method targeting nano/micro scale thermal diffusivity are reported. The method is based on the development of integrated devices having micro heating module and sensing module for the periodic heating and the periodic temperature response from the sample. The cantilever type devices are also utilized for TWA method to realize the measurement in the scanning probe system. The microscale structure of soft materials such as micro structure of the chemically amplified photoresist or the composite between PMMA and highly aligned graphene were investigated. TWA based micro/nano scale measurement can be applied further to the thermal diffusivity in localized structure of soft materials.
https://ror.org/05dqf9946 
