Abstract
The present study is concerned with the fabrication of humidity sensor of Tantalum oxide film for the Effluent gas analysis. Water vapor is rapidly adsorbed on and desorbed from Tantalum oxide layer formed on the surface of Tantalum wire by high temperature oxidation.
The sensor detected the relative humidity change quickly. In the low humidity region (0 to 30% RH), the output of sensor increased linearly with increase in the amount of humidity in atmosphere. Sensor is stable over a long period of time.
