Precision Position Control of Pneumatic Servo Table Embedded with Aerostatic Bearing

抄録

This paper treats the control of a pneumatic servo table combining the air cylinders and sliding guides embedded with aerostatic bearing. Since compressed air flows into the small gap between the bearing and the sliding guide, the cylinder floats around the air film and on the guide surface of the table. The friction forces of the pneumatic servo table are measured, and the relation of frictional force and speed is plotted. The hybrid self-tuning fuzzy controller with the velocity compensators and dead-zone are proposed in this paper. From the experimental results, in case of different position, the positioning accuracy can reach the 0.04μm.