2011 年 5 巻 4 号 p. 513-522
Highly precise positioning control is based on mechatronics. Nanotechnology, especially nanometer positioning technology with high-speed and robust positioning feedback control, is used in various technical fields including measuring systems, magnetic recording and the semiconductor industry. To date, various actuator systems have been proposed, but the structural models have working distance of either less than a millimeter or more than ten millimeters. A structural model with working distance of several millimeters has not been reported in the relevant literature. We propose an actuator structural design that would enable production of actuator systems with such working distances. This actuator has a voice coil motor and a new guide with an elastic support mechanism consisting of a special spring that is restricted to movement in only one direction. This ESM causes no lost motion, friction with motion, or mechanical play. The voice coil motor thrusts and displaces the elastic support mechanism linearly. Therefore, highly precise positioning control can be realized using a simple controller. This paper describes evaluation of the positioning control method from the displacement of ESM and presents basic data for development of future nano-actuator systems.
