2009 年 43 巻 103 号 p. 88-95
In this paper, we describe the development of an advanced micro-EDM device. A smaller micro-EDM process and more complex microshaping technology are required by various industries. To meet these requirements, an original advanced high-speed gap control technique and an independent process feed control function of two-axis contouring have been improved. We observed capability to shape a tungsten electrode minimum diameter of 2.4 μm using low gap voltage of 25 V with high-speed gap control. The capabilities of the advanced micro-EDM function and its application are reported.