It is difficult to miniaturize tools for chamfering and deburring the back sides of micro-through holes.Therefore, chamfering and deburring by EDM were attempted using tool electrodes with the middle part thinner than the other parts. The tungsten tool electrodes were fabricated by wire electrodischarge grinding, and the back sides of micro-through holes drilled in copper and brass sheets were processed. As a result, chamfering was successfully carried out on the back sides of a microhole with a diameter of 60 μm, a deep hole with an aspect ratio of 5 and a noncircular hole. Furthermore, the chamfering of the front and back sides of a hole using a single tool electrode, round chamfering, deburring and counterboring were possible by adjusting the tool electrode shape. In deburring, the burr was removed with hardly any removal of the edge of the hole.