Abstract
This paper reports our recent progresses on micro/nanoscale probe devices for neurons/cells. We report on the fabrication of a microscale diameter 210-μm-long probe array and in vivo neuronal recordings using the probes. The microprobe can also be formed to nanoscale tipped probe, which potentially offers intracellular probe penetrations. We also report on microscale diameter tube-like waveguides, which exhibits light stimuli with a high-spatial resolution. Such optical light stimuli will offer a new class of optogenetic applications, including light stimuli for specific regions of a neuron (e.g., axons or dendrites).
