Abstract
Magnetic tunnel junctions (MTJs) have great advantages for the magnetic field sensor applications. However, a significant improvement of tunnel magneto-resistance (TMR) ratio is needed to detect a small bio-magnetic field. In this study, we fabricated MTJs with half-metallic Co2Fe0.4Mn0.6Si(CFMS) Heusler alloy which are expected to increase TMR ratio. The fabricated MTJswere annealed twice to achieve sensor-type TMR curves. Figure shows the 2nd annealing temperature dependence of TMR curves. In MTJ annealed at 200℃, TMR curve showed a linear resistance response, which is required for sensor applications. This work was supported by the S-Innovation program, Japan Science and Technology Agency (JST).
