生体医工学
Online ISSN : 1881-4379
Print ISSN : 1347-443X
ISSN-L : 1347-443X
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生体磁場センサ応用に向けたホイスラー合金電極 強磁性トンネル接合の作製
小野 敦央大兼 幹彦永沼 博安藤 康夫
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2015 年 53 巻 Supplement 号 p. S187_01

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Magnetic tunnel junctions (MTJs) have great advantages for the magnetic field sensor applications. However, a significant improvement of tunnel magneto-resistance (TMR) ratio is needed to detect a small bio-magnetic field. In this study, we fabricated MTJs with half-metallic Co2Fe0.4Mn0.6Si(CFMS) Heusler alloy which are expected to increase TMR ratio. The fabricated MTJswere annealed twice to achieve sensor-type TMR curves. Figure shows the 2nd annealing temperature dependence of TMR curves. In MTJ annealed at 200℃, TMR curve showed a linear resistance response, which is required for sensor applications. This work was supported by the S-Innovation program, Japan Science and Technology Agency (JST).

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© 2015 社団法人日本生体医工学会
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