A Study on Improvement of the Accuracy of a Three-coordinate Measuring Machine (A Method of Error Correction) : Vibration, Control Engineering, Engineering for Industry

Abstract

A method for correcting measured coordinates with the error vector is proposed. The discrete distribution of the error vector, which is already know for the three-coordinate measuring machine used in the experiment, is utilized in this method. The correction method is as follows: (1) The measuring range is divided into the elements of a rectangular prism; (2) The error vector at any position in the element is calculated from interpo, lation; (3) and Measured coordinates are corrected with the error vector presumed from interpolation. Furthermore, measurements are made of both distance and flatness. The measured values obtained are corrected with the proposed method, and are found to be closer to the true values than those without correction. This correction makes the measuring error less than 3μm, and hence verifies the usefulness of the proposed method.