B-12 Rapid Growth of Diamond-like Carbon Films by Nanopulse Magnetron Chemical Vapor Deposition(Session: Coatings/Thin Films)

Masanori Saito; Takao Saito; Yoshimasa Kondo; Hiroya Murakami; Naoto Ohtake

doi:10.1299/jsmeasmp.2006.35

セッションID: B-12

DOI https://doi.org/10.1299/jsmeasmp.2006.35

会議情報

B-12 Rapid Growth of Diamond-like Carbon Films by Nanopulse Magnetron Chemical Vapor Deposition(Session: Coatings/Thin Films)

Masanori Saito, Takao Saito, Yoshimasa Kondo, Hiroya Murakami, Naoto Ohtake

著者情報

会議録・要旨集フリー

詳細

抄録

Growth rate of DLC films were investigated using magnetic field enhanced nanopulse plasma chemical vapor deposition method. Maximum growth rate of DLC film by this magnetron CVD method is approximately fifty-fold larger than that of conventional plasma CVD method. High growth rate area of DLC film corresponds to the magnetic field distribution region that the field is parallel to the substrate 15 to 20 mm above the substrate.

責任著者(Corresponding author)

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