抄録
Current trends in miniaturization of micro-electro-mechanical systems (MEMS) require the use of smaller and smaller components. Development of those micro-components requires test and measurement methodologies to inspect the deformations of the micro-components for further understanding of their mechanical behaviour. In this paper we have developed optical techniques for measuring deformation of micro-components. As a result of light interference on the component surface various fringe patterns are observed. The fringe patterns which contains information on the component's surface deformation or characteristics are captured with CCD camera incorporated with a microscopy system. The experimental work carried out on various micro-components including micro-beam, microphone, micro-radio-frequency (RF) switch and micro-mirrors. The proposed methods are potentially applicable to in situ inspection of micro-components in MEMS.
