OS06W0426 MEMS device characterization for repeated cyclic operation

Abstract

This paper deals with characterization of micro electro mechanical systems (MEMS) under cyclic loading; such characterization is essential to confirm the reliability of MEMS in practical applications. Examples include torsion beams supporting a micro mirror of an optical matrix switch, a cantilever with a vertical micro mirror of an optical bypass switch, and thermo-elastically deformed 3-D structures. Those devices are made of poly or single-crystal silicon. Typical life time of these devices exceeded a few tens of million cycles.