The Abstracts of ATEM : International Conference on Advanced Technology in Experimental Mechanics : Asian Conference on Experimental Mechanics
Online ISSN : 2424-2837
2003.2
Session ID : OS06W0429
Conference information
OS06W0429 Micro-nano electromechanical systems by silicon bulk-micromachining
Masayoshi Esashi, Takahito Ono
Author information
Keywords: MEMS(Micro ElectroMechanical Systems), NEMS(Nano ElectroMechanical Systems), Micromachining, Gyroscope, Carbon nano-tube, Electron beam lithography system, Data storage
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (601K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
MEMS(Micro ElectroMechanical Systems) and NEMS(Nano ElectroMechanical Systems) have been developed based on a silicon bulk-micromachining. Electrostatically levitated ring rotor gyroscope, thermal RF relay for LSI tester, on-chip AlN thin film resonator, components for multi-column electron beam lithography system and multiprobe data storage system and carbon nano-tube structures are described.
Content from these authors
© 2003 The Japan Society of Mechanical Engineers
Previous article Next article
Favorites & Alerts

Recently viewed articles
Announcements from publisher
Predecessor

Proceedings of the Asian Pacific Conference on Fracture and Strength and International Conference on Advanced Technology in Experimental Mechanics

Share this page
feedback
 Top