抄録
A strain evaluation technique using a micro focus X-ray beam was developed. An electron gun with two electron lenses was used in order to steadily make a fine focus of an electron beam on a copper target. The target current was 84μA, and an X-ray brightness 52×10^9W/m^2 was obtained. X-ray was condensed to a converging angle 0.09 deg with a convergent unit, and the minimum focus diameter was 60μm. A direct beam intensity was 8.5×10^5 cps. The principal strain in a sapphire (1-12) plane was measured. The maximum principal strain ε_1 was in extremely good agreement with the estimated value. In the case of the second principal strain ε_2 and the minimum principal strain ε_3, the error of the sample loaded more than 300με was within 70με. The diffraction patterns were able to be detected for a single grain in a translucent alumina.
