The Abstracts of ATEM : International Conference on Advanced Technology in Experimental Mechanics : Asian Conference on Experimental Mechanics
Online ISSN : 2424-2837
2003
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OS6(3)-11(OS06W0429) Micro-Nano Electromechanical Systems by Silicon Bulk-Micromachining
Masayoshi Esashi, Takahito Ono
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Pages 113-

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© 2003 The Japan Society of Mechanical Engineers
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Proceedings of the Asian Pacific Conference on Fracture and Strength and International Conference on Advanced Technology in Experimental Mechanics

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