OS01F067 Two-Dimensional Electron Moire Method Using Digital Thermal Field Emission Scanning Electron Microscope

Abstract

A novel electron Moire method to measure the two-dimensional deformation at the same time has been developed. An electron Moire fringes which indicate twodimensional deformation can be observed by using a digital thermal field emission scanning electron microscope. For the demonstration of this method, two-dimensional strain distribution on the specimen of fiber reinforced plastic was measured by using this method. 5-micro meter spacing rectangular micro-grid was fabricated on the specimen's surface by electron beam lithography. After deformation, the micro-grid on the specimen's surface was observed by an thermal field emission scanning electron microscope. An electron Moire fringe image which indicate two-dimension electron Moire fringe was observed. From this image, two-dimensional strain (strain parallel to the loading axis and strain perpendicular to the loading axis) distribution was calculated by using the spacing of the electron Moire fringe and the spacing of the electron beam scan.