Numerical Analysis for Preparation of Silicon-Based Intermetallic Nano-Particles in Induction Thermal Plasma Flow Systems

抄録

Numerical analysis is conducted for silicon-based intermetallic nano-particle preparation in induction thermal plasma flow systems. In the nucleation region, the temperature decreases drastically (10⁴-10⁵K/s), which results in a great promotion of nano-particle nucleation. In Mo-Si system, nuclei of molybdenum are produced and grow in the upstream region and then silicon vapor condenses on the molybdenum particles. The composition shows wide range since condensations of molybdenum and silicon occur at the different positions. On the other hand in Ti-Si system, it shows narrow range since condensations of titanium and silicon occur simultaneously. The difference of the formation mechanisms leads to the preparation of disilicides as well as the sub-products which are estimated from the phase diagrams. The particle size distributions and the compositions obtained from the present model show good agreements with the experimental results.