抄録
There is a possibility that flow (thermal creep flow) induced by the temperature gradient along wall can occur in reduced pressure containers. Simulation of this type of flow is important in material technology, such as chemical vapor deposition or in the design of thermal devices that effectively utilize this phenomenon. The present study attempts to simulate this type of flow by the direct simulation Monte Carlo method. As a result, it is demonstrated that thermal creep flows with magnitudes of about 1O-2 of the most probable molecular thermal speed are well simulated by using this method.
