抄録
High concentration of active grains and low bonding strength are important features for increasing the removal rate and reducing the subsurface damage in lapping of brittle materials. Thus, high-concentration lapping discs with low bonding strength have been developed. First, the finishing characteristics using the lapping discs were investigated, varying the concentration of bonding agents and thereby determining that a high removal rate could be obtained at a low concentration. Next, soft abrasives, which may undergo a mechanochemical reaction with workpiece materials, were adopted as the abrasive material of the lapping discs, and colloidal silica which may undergo a chemomechanical reaction with workpiece materials was applied as a coolant in finishing. A mirror-surface finish of less than 10 nm Ra was obtained for various brittle materials, and a smooth-surface finish with no dropout of grains was achieved for aluminum nitride substrates.
