Measurement of 2-D Surface Profile and Motion Errors by Using Software Datum

抄録

In this paper, the asymmetric 2-D mixed method (A2DMM) was proposed to measure 2-D surface profile and scanning errors of the scanning stages.Two phasemodulated fiber interferometric displacement sensors and two angular sensors are developed to construct a measuring probe to realize the method.Zero adjustment errors caused by misalignment of the sensor's zero outputs are also analyzed, and a self-correction method for compensating zero adjustment errors is presented.2-D surface profile of a silver-coated glass plate is measured using this measuring head.The measurement results are evaluated and compared with those obtained by other differential methods.The z-directional translation motion, roll and pitch are accurately evaluated.