抄録
Loose abrasives that are attracted to an electrode surface by means of an electrophoretic phenomenon should be fixed on the electrode surface to increase the polishing efficiency. An anodic film that grows continuously under the process of anodization of an aluminum alloy was employed as a binder of ultrafine silica abrasives. The effects of grain density, grain size, pH and chlorine ion density in the polishing fluid on the generation of the anodic film and the polishing efficiency were examined through the polishing test conducted on a partially stabilized zirconia ceramic. It was revealed that the porous anodic film that was generated where the growth velocity of the anodic film was balanced with the erosion velocity of the barrier film, could be used as the binder of loose abrasives. It was also confirmed that swarf loading decreased with an increase in pore size of the anodic film so that the polishing efficiency increased with increasing pore size of the anodic film.
