The Proceedings of The Computational Mechanics Conference
Online ISSN : 2424-2799
2000.13
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Development of Full-scale Simulator for CVD Processes
Yukinori SAKIYAMA, Yoichiro MATSUMOTO, Shu TAKAGI
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Keywords: Jet Chemical Vapor Deposition, Direct Simulation Monte Carlo, Molecular Orbital, Silane
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Pages 395-396

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© 2000 The Japan Society of Mechanical Engineers
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