The Proceedings of The Computational Mechanics Conference
Online ISSN : 2424-2799
2000.13
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Numerical Analysis of Thermo Regist Enhanced Optical Lithography
Etsutaro AKAGAWA, Kenji AMAYA, Shigeru AOKI
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Keywords: Photoresist, Thermoresist, Non-linear superposition, Excimer laser lithography
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Pages 653-654

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© 2000 The Japan Society of Mechanical Engineers
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